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About 3D ATI

New Paradigm for Multilayered Structure Inspection

Huvitz 3D ATI uses optical coherence tomography technology to reproduce
high-resolution 3 D image in real-time without damaging the sample.
At research centers and production sites, Huvitz 3D ATI evaluates multilayered
structure’s layer-built condition and thickness, detects foreign substances,
and creases non-contact image quickly in a detailed structure.

Comparison between Existing Inspection and 3D ATI Inspection

ATI Technology